Date of Award

Spring 2004

Document Type

Dissertation

Degree Name

Doctor of Philosophy (PhD)

Department

Micro and Nanoscale Systems

First Advisor

James Palmer

Abstract

The objective of this work was to model, fabricate and test silicon based micro components for applications in chemical agent detection. Part I deals with research done on tunable micro Fabry-Perot interferometers. These devices are designed for use in identifying chemicals that absorb radiation in the infrared range of the spectrum. Part II deals with research done on novel Layer by Layer (LbL) assembled enzyme microreactors. These devices are designed for use in identifying chemicals that absorb radiation in the ultraviolet and visible range of the spectrum.

The emphasis of Part I is on the design and modeling of Fabry-Perot Interferometers. Modeling and design evolution are discussed to include an integration of Finite Element and analytical approaches. The electrostatics of the device are analyzed in detail and performance predictions are made. Mechanical characterization of the first generation devices are conducted and the results are compared with the modeling predictions.

The emphasis of Part II is on the testing of LbL assembled enzyme microreactors. Assembly is accomplished by layering enzyme architectures onto the channels of silicon microreactors. Two enzymes are considered in this study, urease and organophosphorous hydrolase (OPH). Feed solutions are pumped into the enzyme microreactors and reaction products are analyzed by ultraviolet (UV)/visible spectroscopy. Comparisons of architectures and microreactors of different geometries are made on the basis of first order kinetic rate activity.

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