Title
Development and realization of a single-mode optical fiber ferrule mold insert with twelve channels
Date of Award
Summer 1998
Document Type
Dissertation
Degree Name
Doctor of Engineering (DEng)
Department
Micro and Nanoscale Systems
First Advisor
Michael J. Vasile
Abstract
A manufacturing process for an optical fiber ferrule mold insert with twelve channels has been established. This research project presents mask design, mask fabrication, deep X-ray lithography exposure, resist developing, nickel electroforming, as well as surface finishing to attain the final result. Deep X-ray mask fabrication methods are explored, including mechanically machined masks, micro-EDM masks, and E-beam written masks. The exposures to pattern resists and electroforming to fabricate nickel molds up to 500 $\mu$m thickness are reported in this study. Nickel structures for the optical fiber ferrule insert with twelve channels made by electroforming are the final products. A practical method to finish the microstructure surface is presented. Channels with precision $-$0.0/+0.5 micron and pitch alignment with 0.25 micron are accomplished to satisfy the requirements of the research sponsor for inserting standard optical fibers (125 $\mu$m in diameter).
Recommended Citation
Yang, Hsiharng William, "" (1998). Dissertation. 740.
https://digitalcommons.latech.edu/dissertations/740