Date of Award

Spring 2000

Document Type


Degree Name

Doctor of Philosophy (PhD)


Electrical Engineering

First Advisor

Khodadad Varahramyan


In this dissertation, the optical application of silicon micromachining technology was investigated in order to create the three-dimensional microstructures that can be used as the components for the MOEMS prototype. These microstructures were designed and fabricated by utilizing corner compensation techniques and silicon bulk micromachining technologies. The fabricated microstructures are silicon mirror arrays that have a 1250 μm etch depth and through-holes across the OE-MCM substrate that has sixteen-fan-out OCDN on front side and a 1mm thickness.

Guided-wave OCDN on MCMs are designed and fabricated to meet the high-speed clocking requirements of next-generation digital systems through a realization of superior network bandwidth, low power consumption, and large fan-out capabilities.

Two fabricated components were assembled to build the MOEMS prototype. From the fiber-to-waveguide butt coupler, the light signal is launched on the waveguide core, and the signal travels and splits along the waveguide. Then, the light signals reflect at the micromachined silicon mirrors which are located in the sixteen fan-out nodes. This device was characterized by measuring the excess loss at the sixteen fan-out nodes at the wavelengths of 1310 nm and 1550 nm. The results show low loss signal propagation and signal uniformity.